Microsystems Research and Development at IMT Neuchatel - Scanning Probe Microsystem for Nanotechnology
1993
Details
Title
Microsystems Research and Development at IMT Neuchatel - Scanning Probe Microsystem for Nanotechnology
Author(s)
Brugger, J. ; Jaecklin, V. P. ; Indermühle, P.-F. ; Linder, C.
Published in
Journal of Micromachine Society
Volume
6
Issue
1
Pages
105
Date
1993
Note
94
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Peer-reviewed publications
Work outside EPFL
Journal Articles
Published
Peer-reviewed publications
Work outside EPFL
Journal Articles
Published
Record creation date
2009-05-12