Micromachined Silicon Tools for Nanometer-Scale Science
1993
Details
Title
Micromachined Silicon Tools for Nanometer-Scale Science
Author(s)
Brugger, J. ; Jaecklin, V. P. ; Buser, R. ; Linder, C. ; de Rooij, N. F.
Published in
Nanosources and Manipulation of Atoms under High Fields and Temperatures : Applications
Series
NATO ASI Series (Series E: Applied Sciences), 235
Pages
311-317
Date
1993
Note
96
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Peer-reviewed publications
Work outside EPFL
Book chapters
Published
Peer-reviewed publications
Work outside EPFL
Book chapters
Published
Record creation date
2009-05-12