Lateral Force Measurements in a Scanning Force Microscope with Piezoresistive Sensors
1995
Details
Title
Lateral Force Measurements in a Scanning Force Microscope with Piezoresistive Sensors
Author(s)
Brugger, J. ; Burger, J. ; Binggeli, M. ; Imura, R. ; de Rooij, N. F.
Published in
Transducers'95 the 8th Internat. Conf. on Solid-State Sensors and Actuators
Pages
636-639
Date
1995
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-05-12