MOLPCVD of Ta2O5 using TaC12H30O5N as Precursor for Batch Fabrication
2003
Details
Title
MOLPCVD of Ta2O5 using TaC12H30O5N as Precursor for Batch Fabrication
Author(s)
Briand, D. ; Mondin, G. ; Jenny, S. ; Banakh, O. ; van der Wal, P. D. ; Jeanneret, S. ; Keppner, H. ; de Rooij, N. F.
Published in
203rd Electrochemical Society Meeting
Volume
2
Pages
790-797
Date
2003
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-05-12