000137517 001__ 137517
000137517 005__ 20180913055241.0
000137517 037__ $$aCONF
000137517 245__ $$aProcessing influence on the reliability of platinum thin films for MEMS applications
000137517 260__ $$c2002
000137517 269__ $$a2002
000137517 336__ $$aConference Papers
000137517 700__ $$0243293$$aBriand, D.$$g188690
000137517 700__ $$aHeimgartner, S.
000137517 700__ $$aLeboeuf, M.
000137517 700__ $$0243301$$ade Rooij, N. F.$$g104887
000137517 773__ $$tBioMEMS and Bionanotechnology
000137517 909C0 $$0252173$$pSAMLAB$$xU10329
000137517 909CO $$ooai:infoscience.tind.io:137517$$pconf
000137517 937__ $$aSAMLAB-CONF-2002-012
000137517 973__ $$aOTHER$$rNON-REVIEWED$$sPUBLISHED
000137517 980__ $$aCONF