Processing influence on the reliability of platinum thin films for MEMS applications
2002
Details
Title
Processing influence on the reliability of platinum thin films for MEMS applications
Author(s)
Briand, D. ; Heimgartner, S. ; Leboeuf, M. ; de Rooij, N. F.
Published in
BioMEMS and Bionanotechnology
Date
2002
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-05-12