Details
Title
Semiconductor Materials: Properties, Technology and Applications
Author(s)
Blanc, N. ; de Rooij, N. F.
Published in
UETP-MEMS FSRM Course: Materials for Microstructures
Pages
93-120
Date
1996
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-05-12