Recent Developments in Silicon-based MEMS Photonic Systems
2007
Details
Title
Recent Developments in Silicon-based MEMS Photonic Systems
Author(s)
Bitterli, R. ; Overstolz, T. ; Waldis, S. ; Stanley, R. ; Zamkostian, F. ; Zickar, M. ; Noell, W. ; de Rooij, N. F.
Published in
MOC'07 13th Microoptics Conference
Date
2007
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-05-12