Fabrication of metallic probes by a new technology based on double molding
1998
Details
Title
Fabrication of metallic probes by a new technology based on double molding
Author(s)
Beuret, C. ; Staufer, U. ; de Rooij, N. F.
Published in
Microelectronic Engineering
Volume
41/42
Pages
543-546
Date
1998
Note
185
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Peer-reviewed publications
Work outside EPFL
Journal Articles
Published
Peer-reviewed publications
Work outside EPFL
Journal Articles
Published
Record creation date
2009-05-12