Fabrication of Nano Interdigitated Electrodes
2003
Details
Title
Fabrication of Nano Interdigitated Electrodes
Author(s)
Berdondini, L. ; Kalbac, M. ; Gautsch, S. ; Gullo, M. ; Staufer, U. ; Koudelka-Hep, M. ; de Rooij, N. F.
Published in
Smart Sensors, Actuators, and MEMS
Series
SPIE Proceedings, 5116
Pages
402-405
Conference
Microtechnologies for the New Millennium 2003, Maspalomas, Gran Canaria, Canary Islands, Spain
Date
2003
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-05-12