Design Fabrication and Characterization of Piezoresistive Pressure Sensors, including the Study of Electrochemical ETCH-STOP
1989
Details
Title
Design Fabrication and Characterization of Piezoresistive Pressure Sensors, including the Study of Electrochemical ETCH-STOP
Author(s)
KLOECK, Benjamin
Advisor(s)
Date
1989
Publisher
Université de Neuchâtel
Note
Jury: A. Shah, W. Sansen (Leuven), A. Kayal (NE), M. Ilegems (EPFL).
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Theses
Work outside EPFL
Theses
Record creation date
2009-05-12