Design Fabrication and Characterization of Piezoresistive Pressure Sensors, including the Study of Electrochemical ETCH-STOP


Advisor(s):
de Rooij, N. F.
Year:
1989
Publisher:
Université de Neuchâtel
Note:
Jury: A. Shah, W. Sansen (Leuven), A. Kayal (NE), M. Ilegems (EPFL).
Laboratories:




 Record created 2009-05-12, last modified 2018-07-07


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