Topography Mediated Patterning of Inorganic Materials by Spray Pyrolysis
A simple technique for microstructuring ceramic thin films by micromachining substrates using standard photolithographic techniques was investigated. The ceramic perovskite is used to illustrate the method because of its importance for the fabrication of electrodes for solid oxide fuel cells and oxygen separation membranes. LSCF thin films were deposited by spray pyrolysis on flat Si substrates and on substrates with thin structures. The appearances of randomly shaped ridges between the intended structures depends on the distance between the structures. The creation of oriented ridges on the thin film is related to the mechanism of film formation during spray pyrolysis. The tendency of the thin film to form ridges can be tailored by the spray pyrolysis. It was observed that LSCF thin films exhibiting random shaped ridges can be produced by choosing the appropriate parameters during spray pyrolysis of metal salt solutions.
Record created on 2009-05-12, modified on 2016-08-08