Flexible Polysiloxane Interconnection between two Substrates for Microsystem Assembly
1995
Details
Title
Flexible Polysiloxane Interconnection between two Substrates for Microsystem Assembly
Author(s)
Arquint, Ph. ; van der Wal, P. D. ; van der Schoot, B. ; de Rooij, N. F.
Published in
Transducers'95 the 8th Internat. Conf. on Solid-State Sensors and Actuators
Pages
263-264
Date
1995
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-05-12