Analysis of the Structure and Drift of Al2O3 Layers used as pH-Sensitive Material for pH-ISFETs
1987
Details
Title
Analysis of the Structure and Drift of Al2O3 Layers used as pH-Sensitive Material for pH-ISFETs
Author(s)
Arnoux, C. ; Buser, R. ; van den Vlekkert, H. H. ; de Rooij, N. F. ; Decroux, M.
Published in
Transducers'87 the 4th International Conference Solid-State Sensors and Actuators
Pages
751-754
Date
1987
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-05-12