Fabrication and Testing of an Integrated Force Sensor Based on a MOS Transistor for Applications in Scanning Force Microscopy
1997
Details
Title
Fabrication and Testing of an Integrated Force Sensor Based on a MOS Transistor for Applications in Scanning Force Microscopy
Author(s)
Akiyama, T. ; Tonin, A. ; Hidber, H.-R. ; Brugger, J. ; Vettiger, P. ; Staufer, U. ; de Rooij, N. F.
Published in
MEMS'97 IEEE 10th Annual Internat. Workshop on Micro Electro Mechanical Systems
Pages
141-146
Date
1997
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-05-12