Integrated atomic force microscopy array probe with metal-oxide-semiconductor field effect transistor stress sensor, thermal bimorph actuator, and on-chip complementary metal-oxide-semiconductor electronics

A fully functional arrangement of a 2×1 array of active and self-detecting cantilevers, stress sensing metal-oxide-semiconductor transistors and thermal bimorph actuators was introduced. One of the two cantilevers was used as a reference while the other one was in AFM operation to compensate for the crosscoupling signal from the actuator to the sensor. This arrangement was not found applicable for many cantilevers in parallel.


Published in:
Journal Vacuum Scientific Technology, B18, 2669-2675
Year:
2000
Note:
227
Laboratories:




 Record created 2009-05-12, last modified 2018-03-17


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