Lithographically defined polymer tips for quartz tuning fork based scanning force microscopes
2001
Details
Title
Lithographically defined polymer tips for quartz tuning fork based scanning force microscopes
Author(s)
Akiyama, T. ; Staufer, U. ; de Rooij, N. F. ; Howald, L. ; Scandella, L.
Published in
Microelectronic Engineering
Volume
57-58
Pages
769-773
Date
2001
Note
249
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Peer-reviewed publications
Work outside EPFL
Journal Articles
Published
Peer-reviewed publications
Work outside EPFL
Journal Articles
Published
Record creation date
2009-05-12