Self-Sensing and -Actuating Probe Based on Quartz Tuning Fork Combined with Microfabrication Cantilever for Dynamic Mode Atomic Force Microscopy
2002
Details
Title
Self-Sensing and -Actuating Probe Based on Quartz Tuning Fork Combined with Microfabrication Cantilever for Dynamic Mode Atomic Force Microscopy
Author(s)
Akiyama, T. ; Staufer, U. ; de Rooij, N. F.
Published in
5th International Conference on Noncontact Atomic Force Microscopy
Pages
74
Date
2002
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-05-12