Microfabricated Electrical Connector for Atomic Force Microscopy Probes with Integrated Sensor/Actuator
2002
Details
Title
Microfabricated Electrical Connector for Atomic Force Microscopy Probes with Integrated Sensor/Actuator
Author(s)
Akiyama, T. ; Staufer, U. ; de Rooij, N. F.
Published in
Japanese Journal of Applied Physics
Volume
4
Pages
4332-4334
Date
2002
Note
281
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Peer-reviewed publications
Work outside EPFL
Journal Articles
Published
Peer-reviewed publications
Work outside EPFL
Journal Articles
Published
Record creation date
2009-05-12