Fast driving technique for integrated thermal bimorph actuator toward high-throughput atomic-force microscopy
2002
Details
Title
Fast driving technique for integrated thermal bimorph actuator toward high-throughput atomic-force microscopy
Author(s)
Akiyama, T. ; Staufer, U. ; de Rooij, N. F.
Published in
Review of Scientific Instruments
Volume
73
Issue
7
Pages
2643-2646
Date
2002
ISSN
00346748
Note
294
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Peer-reviewed publications
Work outside EPFL
Journal Articles
Published
Peer-reviewed publications
Work outside EPFL
Journal Articles
Published
Record creation date
2009-05-12