Fast driving technique for integrated thermal bimorph actuator toward high-throughput atomic-force microscopy


Published in:
Review of Scientific Instruments, 73, 7, 2643-2646
Year:
2002
ISSN:
00346748
Note:
294
Laboratories:




 Record created 2009-05-12, last modified 2018-03-17


Rate this document:

Rate this document:
1
2
3
 
(Not yet reviewed)