Atomic force microscopy using an integrated comb-shape electrostatic actuator for high-speed feedback motion
2000
Details
Title
Atomic force microscopy using an integrated comb-shape electrostatic actuator for high-speed feedback motion
Author(s)
Akiyama, T. ; Staufer, U. ; de Rooij, N. F.
Published in
Applied Physics Letters
Volume
76
Issue
21
Pages
3139-3141
Date
2000
Note
242
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Peer-reviewed publications
Work outside EPFL
Journal Articles
Published
Peer-reviewed publications
Work outside EPFL
Journal Articles
Published
Record creation date
2009-05-12