Wafer- and piece-wise Si tip transfer technologies for applications in scanning probe microscopy
1999
Details
Title
Wafer- and piece-wise Si tip transfer technologies for applications in scanning probe microscopy
Author(s)
Akiyama, T. ; Staufer, U. ; de Rooij, N. F.
Published in
IEEE Journal of Microelectromechanical Systems
Volume
8
Issue
1
Pages
65-70
Date
1999
Note
211
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Peer-reviewed publications
Work outside EPFL
Journal Articles
Published
Peer-reviewed publications
Work outside EPFL
Journal Articles
Published
Record creation date
2009-05-12