Active and self-detecting cantilever with on-chip CMOS electronics for scanning force microscopy
1999
Details
Title
Active and self-detecting cantilever with on-chip CMOS electronics for scanning force microscopy
Author(s)
Akiyama, T. ; Lange, D. ; Hagleitner, C. ; Tonin, A. ; Brand, O. ; Baltes, H. ; Staufer, U. ; de Rooij, N. F.
Published in
Transducers'99 10th Internat. Conf. on Solid-State Sensors and Actuators
Pages
1848-1851
Date
1999
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-05-12