A Force Sensor Using a CMOS Inverter in View of its Application in Scanning Force Microscopy
1996
Details
Title
A Force Sensor Using a CMOS Inverter in View of its Application in Scanning Force Microscopy
Author(s)
Akiyama, T. ; Blanc, N. ; de Rooij, N. F.
Published in
9th Workshop on Micro Electro Mechanical Systems
Pages
447-450
Date
1996
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-05-12