Photoresist-assisted micromechanial-component transfer technique
1999
Details
Title
Photoresist-assisted micromechanial-component transfer technique
Author(s)
Akiyama, T. ; Balmer, P. ; Staufer, U. ; de Rooij, N. F.
Published in
Transducers'99 10th Internat. Conf. on Solid-State Sensors and Actuators
Pages
1162-1165
Date
1999
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-05-12