Parallel atomic force microscopy using optical heterodyne detection
2006
Details
Title
Parallel atomic force microscopy using optical heterodyne detection
Author(s)
Chantada, L. ; Kim, M.-S. ; Manzardo, O. ; Dändliker, R. ; Aeschimann, L. ; Staufer, U. ; Vettiger, P. ; Weible, K. ; Herzig, H. P.
Published in
MEMS, MOEMS, and Micromachining II
Series
Proc. SPIE, 6186
Pages
61860B
Date
2006
Laboratories
OPT
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > OPT - Optics and Photonics Technology Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-04-22