Details
Title
Micro-optics
Author(s)
Cumme, Matthias ; Wittig, Lars C. ; Herzig, Hans Peter ; Kley, Ernst-Bernhard
Published in
Optical MEMS
Pages
75-120
Date
2005
Publisher
Bellingham, SPIE Press
Other identifier(s)
DOI: https://doi.org/10.1117/3.2265061.ch3
Laboratories
OPT
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > OPT - Optics and Photonics Technology Laboratory
Work outside EPFL
Book chapters
Published
Work outside EPFL
Book chapters
Published
Record creation date
2009-04-22