Lateral error reduction in the 3D characterization of deep MOEMS devices using white light interference microscopy
2004
Details
Title
Lateral error reduction in the 3D characterization of deep MOEMS devices using white light interference microscopy
Author(s)
Montgomery, P. ; Montaner, D. ; Manzardo, O. ; Herzig, H. P.
Published in
Optical Micro- and Nanometrology in Manufacturing Technology
Series
Proc. SPIE, 5458
Pages
34-42
Date
2004
Publisher
SPIE-The International Society for Optical Engineering, Bellingham, USA
Laboratories
OPT
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > OPT - Optics and Photonics Technology Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-04-22