Infra-red MEMS-based Lamellar Grating Spectrometer
2004
Details
Title
Infra-red MEMS-based Lamellar Grating Spectrometer
Author(s)
Manzardo, O. ; Schädelin, F. ; Noell, W. ; de Rooij, N. F. ; Herzig, H. P.
Published in
MEMS, MOEMS, and Micromachinig
Series
Proc. SPIE, 5455
Pages
1-8
Date
2004
Publisher
SPIE-The International Society for Optical Engineering, Bellingham, USA
Laboratories
OPT
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > OPT - Optics and Photonics Technology Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-04-22