Details
Title
Application of Diffractive and Micro-Optics in Lithography
Author(s)
Kettunen, V. ; Herzig, H. P.
Published in
Encyclopedia of Modern Optics
Pages
281-290
Date
2004
Publisher
Elsevier, Oxford
ISBN
0-12-227600-0
Laboratories
OPT
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > OPT - Optics and Photonics Technology Laboratory
Work outside EPFL
Book chapters
Published
Work outside EPFL
Book chapters
Published
Record creation date
2009-04-22