Optical microelectromechanical systems (OMEMS) based on silicon-on-insulator (SOI) technology
2002
Details
Title
Optical microelectromechanical systems (OMEMS) based on silicon-on-insulator (SOI) technology
Author(s)
Noell, W. ; Clerc, P.-A. ; Guldimann, B. ; Schürmann, G. ; Staufer, U. ; de Rooij, N. F. ; Herzig, H. P. ; Manzardo, O. ; Dändliker, R. ; Marxer, C.
Published in
Diffractive Optics and Micro-Optics
Series
2002 Technical Digest Series
Pages
114-116
Conference
Diffractive Optics and Micro-Optics 2002, Tucson, Arizona, USA, 3–6 June 2002
Date
2002
Publisher
Washington, DC, USA, Optical Society of America
ISBN
1-55752-710-5
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Scientific production and competences > STI - School of Engineering > STI Archives > OPT - Optics and Photonics Technology Laboratory
Peer-reviewed publications
Work outside EPFL
Conference Papers
Scientific production and competences > STI - School of Engineering > STI Archives > OPT - Optics and Photonics Technology Laboratory
Peer-reviewed publications
Work outside EPFL
Conference Papers
Record creation date
2009-04-22