Fabrication technologies for micro-optical elements with arbitrary surfaces
2000
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Details
Title
Fabrication technologies for micro-optical elements with arbitrary surfaces
Author(s)
Schilling, A. ; Nussbaum, Ph. ; Philipoussis, I. ; Herzig, H. P. ; Stauffer, L. ; Rossi, M. ; Kley, E.-B.
Published in
Micromachining Technology for Micro-Optics
Series
Proc. SPIE, 4179
Pages
65-72
Date
2000
Publisher
SPIE-The International Society for Optical Engineering, Bellingham, USA
Keywords
Laboratories
OPT
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > OPT - Optics and Photonics Technology Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-04-22