Potential of dry etching for the fabrication of fused silica micro-optical elements
1999
Details
Title
Potential of dry etching for the fabrication of fused silica micro-optical elements
Author(s)
Nussbaum, Ph. ; Weible, K. J. ; Rossi, M. ; Herzig, H. P.
Published in
Micromachine Technology for Diffractive and Holographic Optics
Series
Proc. SPIE, 3879
Pages
63-70
Date
1999
Publisher
SPIE-The International Society for Optical Engineering, Bellingham, USA
Laboratories
OPT
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > OPT - Optics and Photonics Technology Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-04-22