Potential of dry etching for the fabrication of fused silica micro-optical elements


Published in:
Micromachine Technology for Diffractive and Holographic Optics, 63-70
Year:
1999
Publisher:
SPIE-The International Society for Optical Engineering, Bellingham, USA
Laboratories:




 Record created 2009-04-22, last modified 2018-09-13


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