Microfactory on a Chip
1998
Details
Title
Microfactory on a Chip
Author(s)
Gueniat, O. T. ; Hirata, T. ; Akashi, T. ; Grétillat, M.-A. ; Boillat, M. ; van der Schoot, B.H. ; Fluri, K. ; Verpoorte, E. ; Roulet, J.-C. ; Völkel, R. ; Herzig, H. P. ; Dändliker, R. ; de Rooij, N. F.
Published in
IWMF'98 International Workshop on Microfactories
Pages
15-20
Date
1998
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Scientific production and competences > STI - School of Engineering > STI Archives > OPT - Optics and Photonics Technology Laboratory
Work outside EPFL
Conference Papers
Published
Scientific production and competences > STI - School of Engineering > STI Archives > OPT - Optics and Photonics Technology Laboratory
Work outside EPFL
Conference Papers
Published
Record creation date
2009-04-22