Optical measurement of the global and local geometry of grating structures
1998
Details
Title
Optical measurement of the global and local geometry of grating structures
Author(s)
Blattner, P. ; Traut, S. ; Herzig, H. P.
Published in
Diffractive Optics and Micro-Optics
Series
1998 Technical Digest Series, vol. 10
Pages
DThA2-1/247-DThA2-1/249
Date
1998
Publisher
Optical Society of America, Washington, DC, USA
Laboratories
OPT
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > OPT - Optics and Photonics Technology Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-04-22