Microlens Lithography and Smart Masks
1997
Details
Title
Microlens Lithography and Smart Masks
Author(s)
Völkel, R. ; Herzig, H. P. ; Nussbaum, Ph. ; Blattner, P. ; Dändliker, R. ; Cullmann, E. ; Hugle, W.B.
Published in
Microelectronic Engineering
Volume
35
Pages
513-516
Date
1997
Laboratories
OPT
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > OPT - Optics and Photonics Technology Laboratory
Peer-reviewed publications
Work outside EPFL
Journal Articles
Published
Peer-reviewed publications
Work outside EPFL
Journal Articles
Published
Record creation date
2009-04-22