New lithographic techniques using microlens arrays
1997
Details
Title
New lithographic techniques using microlens arrays
Author(s)
Völkel, R. ; Herzig, H. P. ; Nussbaum, Ph. ; Blattner, P. ; Dändliker, R. ; Cullmann, E. ; Hugle, W.B.
Published in
Microlens Arrays
Series
EOS Topical Meetings Digest Series, 13
Pages
105-109
Date
1997
Publisher
European Optical Society
Laboratories
OPT
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > OPT - Optics and Photonics Technology Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-04-22