Micro-opto-mechanical systems: study of an array of torsional micro-mirrors in an opto-mechanical switch
1997
Details
Title
Micro-opto-mechanical systems: study of an array of torsional micro-mirrors in an opto-mechanical switch
Author(s)
Peter, Y.-A. ; Herzig, H. P.
Published in
Diffractive Optics
Series
EOS Topical Meetings Digest Series, 12
Pages
226-227
Date
1997
Publisher
European Optical Society
Laboratories
OPT
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > OPT - Optics and Photonics Technology Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-04-22