Details
Title
Microlens lithography
Author(s)
Völkel, R. ; Herzig, H. P. ; Nussbaum, Ph. ; Singer, W. ; Dändliker, R.
Published in
Diffractive Optics and Micro-Optics
Series
1996 Technical Digest Series, Vol. 5
Pages
278-281
Date
1996
Publisher
Optical Society of America, Washington DC, USA
Laboratories
OPT
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > OPT - Optics and Photonics Technology Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-04-22