Details
Title
Optical testing of fine gratings structures
Author(s)
Blattner, P. ; Herzig, H. P.
Published in
Optical Inspection and Micromeasurements
Series
Proc. SPIE, 2782
Pages
628-634
Date
1996
Publisher
SPIE-The International Society for Optical Engineering, Bellingham, USA
Laboratories
OPT
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > OPT - Optics and Photonics Technology Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-04-22