Journal article

Monolithically integrated optical displacement sensor in GaAs/AlGaAs

A monolithically integrated displacement sensor has been fabricated in the GaAs/AlGaAs material system. The device is configured as a Michelson interferometer and consists of a DBR laser, a directional coupler, transparent waveguides and a photodetector. Interference fringes could be seen at a measurement distance of up to 45cm, requiring only the alignment of an external GRIN lens for beam collimation.


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