Interferometric fabrication of modulated submicrometer gratings in photoresist
1995
Details
Title
Interferometric fabrication of modulated submicrometer gratings in photoresist
Author(s)
Ehbets, P. ; Herzig, H. P. ; Nussbaum, Ph. ; Blattner, P. ; Dändliker, R.
Published in
Applied Optics
Volume
34
Pages
2540-2547
Date
1995
Laboratories
OPT
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > OPT - Optics and Photonics Technology Laboratory
Peer-reviewed publications
Work outside EPFL
Journal Articles
Published
Peer-reviewed publications
Work outside EPFL
Journal Articles
Published
Record creation date
2009-04-22