Non-conventional techniques for optical lithography
1995
Details
Title
Non-conventional techniques for optical lithography
Author(s)
Dändliker, R. ; Gray, S. ; Clube, F. ; Herzig, H. P. ; Völkel, R.
Published in
Microelectronic Engineering
Volume
27
Pages
205-211
Date
1995
Laboratories
OPT
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > OPT - Optics and Photonics Technology Laboratory
Peer-reviewed publications
Work outside EPFL
Journal Articles
Published
Peer-reviewed publications
Work outside EPFL
Journal Articles
Published
Record creation date
2009-04-22