Details
Title
Photolithography with lenslet arrays
Author(s)
Dändliker, R. ; Völkel, R. ; Herzig, H. P. ; Hugle, W.B.
Published in
Vakuumelektronik und Displays
Series
IRG-Fachbericht 132
Pages
241-246
Date
1995
Publisher
VDE-Verlag GmbH, Berlin
Laboratories
OPT
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > OPT - Optics and Photonics Technology Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-04-22