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conference paper
Modulated submicron gratings
1994
International Conference on Optical Metrology and Nanontechnology
Type
conference paper
Authors
•
Ehbets, P.
•
Nussbaum, P.
•
•
Clube, F. S. M.
•
Gray, S.
•
Tisserand, J. C.
Publication date
1994
Published in
International Conference on Optical Metrology and Nanontechnology
Series title/Series vol.
EOS Topical Meetings Digests Series Volume 4
Start page
62
End page
63
EPFL units
Available on Infoscience
April 22, 2009
Use this identifier to reference this record