Details
Title
Holographic photolithography for submicron VLSI structures
Author(s)
Brook, J. ; Dändliker, R.
Published in
Microelectronic Engineering
Volume
11
Pages
127-131
Date
1990
Laboratories
OPT
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > OPT - Optics and Photonics Technology Laboratory
Peer-reviewed publications
Work outside EPFL
Journal Articles
Published
Peer-reviewed publications
Work outside EPFL
Journal Articles
Published
Record creation date
2009-04-22