Details
Title
Holographic photolithography for submicron VLSI structures
Author(s)
Dändliker, R. ; Brook, J.
Published in
Holographic Systems, Components and Applications, Bath, UK
Series
Conference Publication No. 311
Pages
127-132
Date
1989
Publisher
IEE-Institute of Electrical Engineers, London, UK
Laboratories
OPT
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > OPT - Optics and Photonics Technology Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-04-22