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We present a novel method for the fabrication of well-ordered, two-dimensional nanocluster arrays. The method is based on the confined nucleation of adatoms within the superstructure cells of periodic surface dislocation networks, which form in many heteroepitaxial systems. Sire show how quantitative understanding of adatom diffusion and heterogeneous nucleation on such surfaces can be obtained through kinetic Monte-Carlo simulations and discuss the potential of this approach.

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